Our products are designed and built with the end-user in mind. The operator interface is designed to be intuitive and product performance is tailored to ensure complete customer satisfaction.
Harmonic Ratio Analyzer / model HRA-002 - OVERVIEW
|
|
The HRA-002 is a multi-channel, spectrum-analyzing device that provides harmonic amplitude information that scales automatically as the input power (fundamental) is adjusted. Any harmonic generating components, within the RF system can be easily identified with this device allowing improved process control and reduced costs. The HRA-002 system is a measurement and reporting tool for RF-systems operating at 13.56 MHz and 400kHz. Other frequencies are available upon request. |
| |
|
|
The HRA system is especially useful in providing real-time monitoring of the harmonic amplitude as it is affected by changes within the sputtering chamber. This tool will allow the semi-conductor manufacturer to react immediately to sudden or adverse changes in the RF system by monitoring the RS-232 output data with the built-in time stamp. By monitoring the data over time, drifts within the RF-system can be identified and rectified before the process quality is affected. |
|
 |
Power handling capability is dependent upon selection of the sampling head used in the HRA system. THe CLR 002 and CLR 1350 RF couplers allow operation from 100 to 10kW and can be fitted with quick disconnect connectors or to suit customer requirements.
|
